Entegris is a leading supplier of advanced materials and process solutions for the semiconductor and high-tech industries. With a mission to help customers improve productivity and performance, Entegris provides innovative solutions for the most advanced manufacturing environments worldwide.
With approximately 8,000 employees across global operations, Entegris is ISO 9001 certified and has facilities in the United States and across the globe. Entegris offers the broadest range of fluid management solutions, gas filtration, and purification products, supporting high-performance manufacturing processes from bulk chemical distribution to advanced lithography.
Create an ultra-clean, chemically resistant, leak-free delivery network with our PureBond® weldable PFA pipe. It is suitable for high-purity, high corrosive chemical handling applications where a permanent connection is required.
Our NT™ Proportional Control Valves are resistant to harsh chemical environments and external spray-downs. With the latest motor driver technology, the internal electronics control all aspects of the valve’s stepper motor.
Using an inert sapphire sensor, the NT™ pressure transducer measures vacuum and positive pressure conditions. Constructed without fill fluids or diaphragms, the transducer provides reliability in conditions where other non-metallic sensors fail and offers accuracy to one percent (1%) of the span.
Micro-machined SiC substrate with conformal CVD diamond coating delivers long-life, highly uniform pad conditioning while minimizing substrate damage. Planargem® CMP Pad Conditioners offer leading-edge, customer-tailored performance across all aspects of the CMP Process.
Planarcore® PVA Brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications. The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction fitted to the core.
The patented Sentry® QCII & QCIII Quick Connect System comprises a key coded dispense head (DH) and drum insert (DI) that self-align, simplifying the assembly process significantly.
Entegris offers industry-leading products, including a complete line of tube and pipe fittings for use in fluid handling systems. These fittings provide clean, robust, leak-free connection technology for high-temperature and high-pressure applications.
High-purity, PFA corrosion-resistant valves provide maximum fluid control of corrosive chemicals, DI water, solvents and slurries.
Long-lasting, reliable Nitrogen spray guns for use in high purity, chemically corrosive applications
OUR GPU GAS PURIFIERS EFFICIENTLY REMOVE HALOGENATED GASES, HYDRIDES, REACTIVE OXIDES, SATURATED AND UNSATURATED HYDROCARBONS, FLUOROCARBONS, AND CHLOROCARBONS AT A VARIETY OF FLOW RATES.
Entegris ultrapure gas filtration products offer 0.003-micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.
The patented Sentry® QCII & QCIII Quick Connect System comprises a key-coded dispense head (DH) and drum insert (DI) that self-align, simplifying the assembly process significantly.
Photochemical Dispense Systems and Network Communication Systems
Without process intrusion or interruption, the InVue® NX148 Concentration Monitor offers single-channel measurement of real-time information for in-line chemical mixing, blending, spiking, and dilution.
Best-in-class, bulk slurry filter with ultra-high particle loading capacity for bulk processes in sub-45 nm technology nodes. Enables superior hard particle removal and gel retention performance to prevent micro scratches.
We offer ultrapure PFA tubing for use in highly corrosive environments and where resistance to certain specialized developers containing surfactants is required.
