Gas Filtration & Purification

Entegris Gas Purifiers

Entegris Gas Purifiers GateKeeper® GPU Gas Purifiers OUR GPU GAS PURIFIERS EFFICIENTLY REMOVE HALOGENATED GASES, HYDRIDES, REACTIVE OXIDES, SATURATED AND UNSATURATED HYDROCARBONS, FLUOROCARBONS, AND CHLOROCARBONS AT A VARIETY OF FLOW RATES.

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Entegris Gas Filters

Nickel, Stainless Steel and Teflon® Filter Technologies Entegris ultrapure gas filtration products offer 0.003-micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing

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