Entegris Gas, Nitrogen & DI Spray Guns
Long-lasting, reliable Nitrogen spray guns for use in high purity, chemically corrosive applications
Entegris Gas Purifiers
OUR GPU GAS PURIFIERS EFFICIENTLY REMOVE HALOGENATED GASES, HYDRIDES, REACTIVE OXIDES, SATURATED AND UNSATURATED HYDROCARBONS, FLUOROCARBONS, AND CHLOROCARBONS AT A VARIETY OF FLOW RATES.
Entegris Gas Filters
Entegris ultrapure gas filtration products offer 0.003-micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.
Entegris Dispense Pumps
Photochemical Dispense Systems and Network Communication Systems
Entegris CMP Filtration Solutions
Best-in-class, bulk slurry filter with ultra-high particle loading capacity for bulk processes in sub-45 nm technology nodes. Enables superior hard particle removal and gel retention performance to prevent micro scratches.
Entegris Planargem CMP Pad Conditioners
Micro-machined SiC substrate with conformal CVD diamond coating delivers long-life, highly uniform pad conditioning while minimizing substrate damage. Planargem® CMP Pad Conditioners offer leading-edge, customer-tailored performance across all aspects of the CMP Process.
Entegris Planarcore CMP Brushes
Planarcore® PVA Brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications. The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction fitted to the core.