Best-in-class, bulk slurry filter with ultra-high particle loading capacity for bulk processes in sub-45 nm technology nodes. Enables superior hard particle removal and gel retention performance to prevent micro scratches.
OVERVIEW OF PRODUCTS
- Planargard® NMB Bulk CMP Filters
- Planargard® CL Bulk and Point-of-Use Cartridge Filters
- Planarcap® TPX Disposable Filters
PRODUCT DOWNLOAD
Entegris Planargard® NMB Bulk CMP Filters
Planargard® CL Filter
Bulk CMP slurry filter for 65 nm or greater technology nodes to prevent micro-scratches
Product Downloads
Planargard® CL Bulk and Point-of-Use Cartridge Filter
Planarcap® TPX Filter
Point-of-dispense CMP slurry filter to prevent micro-scratches
