Micro-machined SiC substrate with conformal CVD diamond coating delivers long-life, highly uniform pad conditioning while minimizing substrate damage. Planargem® CMP Pad Conditioners offer leading-edge, customer-tailored performance across all aspects of the CMP Process.
OVERVIEW OF PRODUCTS
- Tunable coating roughness provides alignment with customer performance requirements
- CVD diamond coating eliminates defects caused by lost or broken diamonds
- Tunable SiC features offer performance flexibility to match customer process
- Micro-machined silicon carbide carrier offers superior feature consistency with conditioner life and uniformity improvement
